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1
A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
Sang Yong Kim, | 한국전기전자재료학회 | 2004 ,
2
Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Sang Yong Kim, | 한국전기전자재료학회 | 2004 ,
3
Failure Analysis for High via Resistance by HDP CVD System for IMD Layer
Failure Analysis for High via Resistance by HDP CVD System for IMD Layer
Sang Yong Kim, | 한국전기전자재료학회 | 2003 ,
4
Reduction of Plasma Process Induced Damage during HDP IMD Deposition
Reduction of Plasma Process Induced Damage during HDP IMD Deposition
Sang Yong Kim, | 한국전기전자재료학회 | 2003 ,
5
A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
Sang Yong Kim, | 한국전기전자재료학회 | 2002 ,
6
Fruiting Body Development of a Root Pathogenic Fungus, Rhizina undulata, after Forest Fire in Eastern Coastal Pine Forests of Korea
Fruiting Body Development of a Root Pathogenic Fungus, Rhizina undulata, after Forest Fire in Eastern Coastal Pine Forests of Korea
Jong Kyu Lee, | 한국임학회 | 2006 ,
7
4H-SiC Planar MESFET for Microwave Power Device Applications
4H-SiC Planar MESFET for Microwave Power Device Applications
Hoon Joo Na, | 대한전자공학회 | 2005 ,
8
High Conversion Gain Q-band Active Sub-harmonic Mixer Using GaAs PHEMT
High Conversion Gain Q-band Active Sub-harmonic Mixer Using GaAs PHEMT
Won-Young Uhm, | 대한전자공학회 | 2003 ,
9
Property ImProvement of Aluminum-Oxide Thin Films Deposited under Photon Radiation by Using Atomic Layer Deposition
Property ImProvement of Aluminum-Oxide Thin Films Deposited under Photon Radiation by Using Atomic Layer Deposition
Hyeong Joon Kim, | 한국물리학회 | 2006 ,
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