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Reduction of Plasma Process Induced Damage during HDP IMD Deposition
Reduction of Plasma Process Induced Damage during HDP IMD Deposition
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Sang Yong Kim
- 서명/저자
- Reduction of Plasma Process Induced Damage during HDP IMD Deposition / Sang Yong Kim , Woo Sun Lee , Yong Jin Seo
- 발행사항
- 서울 : 한국전기전자재료학회, 2003.
- 형태사항
- pp. 14-17
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232655
MARC
008190927s2003 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼a Reduction of Plasma Process Induced Damage during HDP IMD Deposition▼dSang Yong Kim▼eWoo Sun Lee , Yong Jin Seo
■260 ▼a서울▼b한국전기전자재료학회▼c2003.
■300 ▼app. 14-17
■500 ▼aIncludes Bibliography
■7001 ▼aWoo Sun Lee , Yong Jin Seo
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.3, No.3 (2002 September)▼d2003, 09
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014498▼b60055341▼h8▼s2▼fP
