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Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Hyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim, | 대한금속.재료학회 | 2003 ,
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