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Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
상세정보
MARC
008031022s2003 ULKa a ENG■022 ▼a12259438
■245 ▼aLeakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3▼dHyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
■260 ▼a서울▼b대한금속.재료학회▼c2003.
■300 ▼app. 485-488
■653 ▼aLEAKAGE▼aCURRENTS▼aTIOTA2O5▼aFILM▼aDEPOSITED▼aTATIAL2O3
■700 ▼aHyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
■773 ▼tMetals and Materials▼gVOL.9 NO.5 (2003 OCTOBER)▼d2003, 10
■SIS ▼aS010463▼b60013551▼h8▼s2


