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2 Results:AA:VADIM YU PLAKSIN 0.76 sec.
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1
Etching of silicon Substrates by Using a Plasmatron
Etching of silicon Substrates by Using a Plasmatron
Vadim Yu Plaksin, | 한국물리학회 | 2007 ,
2
Application of a High-Durability DC arc Plasmatron to Plasma-Chemical Processing of Silicon Substrates
Application of a High-Durability DC arc Plasmatron to Plasma-Chemical Processing of Silicon Substrates
Valentin A. Riaby., | 한국물리학회 | 2006 ,
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