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1
SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge
SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge
Soo Yeon Jeong, | 한국전기전자재료학회 | 2007 ,
2
Capacitance Between an Atmospheric Discharge Plasma and the Dielectric Electrode in the Parallel Cell Reactor
Capacitance Between an Atmospheric Discharge Plasma and the Dielectric Electrode in the Parallel Cell Reactor
Gon-Ho Kim, | 한국물리학회 | 2006 ,
3
SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
Jeong, Soo-Yeon, | 한국전기전자재료학회 | 2007 ,
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