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SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Jeong, Soo-Yeon
- 서명/저자
- SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge / Soo-Yeon Jeong , by Ji-Hun Kim , Yong-Seuk Hwang , Gon-Ho Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2007.
- 형태사항
- pp. 204-209
- 기타저자
- Kim, Ji-Hun
- 기타저자
- Hwang, Yong-Seuk
- 기타저자
- Kim, Gon-Ho
- Control Number
- kjul:60085908
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aJeong, Soo-Yeon
■245 ▼aSF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge▼dSoo-Yeon Jeong▼eby Ji-Hun Kim▼eYong-Seuk Hwang▼eGon-Ho Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 204-209
■653 ▼aSF6▼aO₂EFFECTS▼aASHING▼aN₂ATMOSPHERICDIELECTRIC▼aBARRIER▼aDISCHARGE
■7001 ▼aKim, Ji-Hun
■7001 ▼aHwang, Yong-Seuk
■7001 ▼aKim, Gon-Ho
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
