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1
Polarized Effects in Optical Lithography with High NA Technology
Polarized Effects in Optical Lithography with High NA Technology
Sang-Kon Kim, | 한국물리학회 | 2007 ,
2
Thermal Effect Study for a Chemically Amplified Resist
Thermal Effect Study for a Chemically Amplified Resist
Sang-Kon Kim, | 한국물리학회 | 2006 ,
3
Simulator for the Design Considered Critical Dimension Bias in Resist Reflow Process
Simulator for the Design Considered Critical Dimension Bias in Resist Reflow Process
Sang-kon Kim., | 한국물리학회 | 2006 ,
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