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Thermal Effect Study for a Chemically Amplified Resist
Thermal Effect Study for a Chemically Amplified Resist
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Sang-Kon Kim
- 서명/저자
- Thermal Effect Study for a Chemically Amplified Resist / Sang-Kon Kim
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1211-1216
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144231
MARC
008101007s2006 ulka a eng■022 ▼a03744884
■1001 ▼aSang-Kon Kim
■24510▼aThermal Effect Study for a Chemically Amplified Resist▼dSang-Kon Kim
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1211-1216
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 3 (2006. 9)▼d2006, 09
■SIS ▼aS034322▼b60077342▼h8▼s2▼fP
