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1 Results:AA:M AKAZAWA YOSUKE SAKAI H SUGAWARA M TABATA 0.109 sec.
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Invited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas
Invited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas
Y . Sakai, | 한국전기전자재료학회 | 2002 ,
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