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Invited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas
Invited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Y . Sakai
- Title/Author
- Invited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas / Y . Sakai ; M . Akazawa , Yosuke Sakai , H . Sugawara , M . Tabata
- Publish Info
- 서울 : 한국전기전자재료학회, 2002.
- Material Info
- pp. 1-6
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- M . Akazawa , Yosuke Sakai , H . Sugawara , M . Tabata
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.2, No.1 (2001 March) 2002, 03
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232570
MARC
008190927s2002 ulk aa eng■022 ▼a12297607
■1001 ▼aY . Sakai
■24510▼aInvited Paper : CxFy Polymer Film Deposition in rf and dc C7F16 Vapor Plasmas▼d Y . Sakai ▼eM . Akazawa , Yosuke Sakai , H . Sugawara , M . Tabata
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 1-6
■500 ▼aIncludes Bibliography
■7001 ▼aM . Akazawa , Yosuke Sakai , H . Sugawara , M . Tabata
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.2, No.1 (2001 March)▼d2002, 03
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014492▼b60055341▼h8▼s2▼fP
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