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1
Stress and Stress Voiding in Cu/Low-k Interconnects
Stress and Stress Voiding in Cu/Low-k Interconnects
Jong-Min Paik, | 대한전자공학회 | 2003 ,
2
Stress and Stress Induced Failure of Damascene Cu Interconnects
Stress and Stress Induced Failure of Damascene Cu Interconnects
Jong-Min Paik, | 대한금속재료학회 | 2005 ,
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