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Stress and Stress Induced Failure of Damascene Cu Interconnects
Stress and Stress Induced Failure of Damascene Cu Interconnects
상세정보
- 자료유형
- 기사
- ISSN
- 17388090
- 저자명
- Jong-Min Paik
- 서명/저자
- Stress and Stress Induced Failure of Damascene Cu Interconnects / Jong-Min Paik , Il-Mok Park , nd Young-Chang Joo
- 발행사항
- 서울 : 대한금속재료학회, 2005.
- 형태사항
- pp. 77-86
- 기타저자
- Il-Mok Park
- 기타저자
- nd Young-Chang Joo
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60132188
MARC
008100607s2005 ulka a eng■022 ▼a17388090
■1001 ▼aJong-Min Paik
■24510▼aStress and Stress Induced Failure of Damascene Cu Interconnects▼dJong-Min Paik▼eIl-Mok Park▼end Young-Chang Joo
■260 ▼a서울▼b대한금속재료학회▼c2005.
■300 ▼app. 77-86
■7001 ▼aIl-Mok Park
■7001 ▼and Young-Chang Joo
■773 ▼tELECTRONIC MATERIALS Letters▼gVol. 1 No. 1▼d2005, 11
■SIS ▼aS027262▼b60077032▼h8▼s2▼fP
