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1
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Hyosang Lee, | 한국전기전자재료학회 | 2008 ,
2
Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
Hyo Sang Lee, | 한국전기전자재료학회 | 2008 ,
3
Regular Paper : Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP
Regular Paper : Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP
Hyo Sang Lee, | 한국전기전자재료학회 | 2008 ,
4
Current Limiting Characteristics of a Flux-Lock Type SFCL for a Single-Line-to-Ground Fault
Current Limiting Characteristics of a Flux-Lock Type SFCL for a Single-Line-to-Ground Fault
Geum-Kon Oh, | 한국조명전기설비학회 | 2006 ,
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