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Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Hyo Sang Lee
- 서명/저자
- Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy / Hyo Sang Lee , 공저 Ara Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
- 발행사항
- 서울 : 한국전기전자재료학회, 2008.
- 형태사항
- pp. 5-10
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230056
MARC
008190725s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aHyo Sang Lee
■24510▼aStudy of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy▼dHyo Sang Lee ▼e공저 Ara Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 5-10
■500 ▼a참고문헌 수록
■7001 ▼aAra Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.1 (2007 February)▼d2008, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS037648▼b60055341▼h8▼s2▼fP
