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1
SDB와 전기화학적 식각정지에 의한 벌크 마이크로머신용 3차원 미세구조물 제작
SDB와 전기화학적 식각정지에 의한 벌크 마이크로머신용 3차원 미세구조물 제작
정귀상 ( Gwiy Sang Chung ), | 한국전기전자재료학회 | 2002 ,
2
Si(100) 기관 위에 성장된 3C-SiC 박막의 물리적 특성
Si(100) 기관 위에 성장된 3C-SiC 박막의 물리적 특성
정귀상 ( Gwiy Sang Chung ), | 한국전기전자재료학회 | 2002 ,
3
Si(100)기판위에 성장된 3C-SiC 박막의 반응성 이온식각 특성
Si(100)기판위에 성장된 3C-SiC 박막의 반응성 이온식각 특성
정귀상 ( Gwiy Sang Chung ), | 한국전기전자재료학회 | 2004 ,
4
Regular Paper : Electrochemical Etch - Stop Suitable for MEMS Applications
Regular Paper : Electrochemical Etch - Stop Suitable for MEMS Applications
Gwiy Sang Chung, | 한국전기전자재료학회 | 2002 ,
5
Regular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties
Regular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties
Gwiy Sang Chung, | 한국전기전자재료학회 | 2002 ,
6
Fabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges
Fabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges
Gwiy-Sang Chung, | 한국물리학회 | 2006 ,
7
Fabrication and Characteristics of Si Piezoresistive Micropressure Sensors for Tactile Imaging Devices
Fabrication and Characteristics of Si Piezoresistive Micropressure Sensors for Tactile Imaging Devices
Gwiy-sang Chung., | 한국물리학회 | 2006 ,
8
Fabrication of SOI Structures with Buried Cavities Using Si Wafer Direct Bonding and Electrochemical Etch-stop
Fabrication of SOI Structures with Buried Cavities Using Si Wafer Direct Bonding and Electrochemical Etch-stop
Gwiy-Sang Chung, | 대한금속.재료학회 | 2003 ,
9
The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures
The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures
Gwiy-Sang Chung, | 대한금속.재료학회 | 2002 ,
10
Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Gwiy-Sang Chung, | 대한금속.재료학회 | 2001 ,
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