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Fabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges
Fabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Gwiy-Sang Chung
- 서명/저자
- Fabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges / Gwiy-Sang Chung , Kyu-Chol Lee , Jong-Hwa Lee
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1379-1383
- 기타저자
- Kyu-Chol Lee
- 기타저자
- Jong-Hwa Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144733
MARC
008101011s2006 ulka a eng■022 ▼a03744884
■1001 ▼aGwiy-Sang Chung
■24510▼aFabrication and Characteristics of a Micromachined Ceramic Pressure Sensor Based on Tantalum-Nitride Thin-film Strain Gauges▼dGwiy-Sang Chung▼eKyu-Chol Lee▼eJong-Hwa Lee
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1379-1383
■7001 ▼aKyu-Chol Lee
■7001 ▼aJong-Hwa Lee
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
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