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Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Cheung, Robin, 569.3-C526a | Materials Research Society | 1998 569.3-C526a,
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