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Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
상세정보
- 자료유형
- 단행본
- ISBN
- 1558994122
- 청구기호
- 569.3 C526a
- 저자명
- Cheung, Robin
- 서명/저자
- Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan / editors Robin Cheung...[et al].
- 발행사항
- Warrendale,PA : Materials Research Society, 1998.
- 형태사항
- xviii,765 p. : illus. ; 23 cm.
- 주기사항
- "Sponsored by continuing education in engineering, university extension, university of california at berkeley, U.S.A."
- 기타저자
- Klein, Jeffrey
- 기타저자
- Kobayashi, Nobuyoshi
- 기타저자
- Murakami, Masanori
- 기타저자
- Tsubouchi, Kazuo
- 가격
- 54000
- Control Number
- kjul:50024744
MARC
008011011s1998 us a 000 eng■005 20011011165558.0
■020 ▼a1558994122
■090 ▼a569.3▼bC526a
■1001 ▼aCheung, Robin
■24510▼aAdvanced metallization and interconnect systems for ULSI applications in 1997▼bProceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan▼deditors Robin Cheung...[et al].
■260 ▼aWarrendale,PA▼bMaterials Research Society▼c1998.
■300 ▼axviii,765 p.▼billus.▼c23 cm.
■50000▼a"Sponsored by continuing education in engineering, university extension, university of california at berkeley, U.S.A."
■7001 ▼aKlein, Jeffrey
■7001 ▼aKobayashi, Nobuyoshi
■7001 ▼aMurakami, Masanori
■7001 ▼aTsubouchi, Kazuo
■9500 ▼b54000
