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낮은 에너지의 As2+ 이온 주입을 이용한 얕은 n+-p 접합을 가진 70nm NMOSFET의 제작
낮은 에너지의 As2+ 이온 주입을 이용한 얕은 n+-p 접합을 가진 70nm NMOSFET의 제작
최병용, 성석강, 이종덕, | 대한전자공학회 | 2001 ,
32
MIT
MIT
Massachusetts Institute of Technology, 740.05-M414m-P | Mit Working Papers in Linguistics | 1992 740.05-M414m-P,
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