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11
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth
Hyoun Woo Kim,Kwang-Sik Kim, | 대한금속.재료학회 | 2002 ,
12
Study of Oxygen and Carbon Species on Si Substrate DUring In-Situ Cleaning Prior to High-Quality Epitaxial Deposition
Study of Oxygen and Carbon Species on Si Substrate DUring In-Situ Cleaning Prior to High-Quality Epitaxial Deposition
Hyoun-Woo Kim,Kwang-Sik Kim, | 대한금속.재료학회 | 2002 ,
13
Effect of In-Situ Plasma Cleaning On the Crystalline Quality of silicon Homoepitaxial Films
Effect of In-Situ Plasma Cleaning On the Crystalline Quality of silicon Homoepitaxial Films
Kwang-sik Kim,Hyoun-woo Kim, | 대한금속.재료학회 | 2001 ,
14
전기도금 전처리 시 Plasam Cleaning 적용에 관한 연구
전기도금 전처리 시 Plasam Cleaning 적용에 관한 연구
민병승,서근호,정원섭, | 대한금속.재료학회 | 2002 ,
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1
Maclean's
Rogers Media, Publishing Ltd. [, ]
2
Semiconductor Wafor Cleaning and Surface Characterization
대한금속재료학회(구 대한금속학회) [기계공학, ]