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Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth
상세정보
MARC
008000108s2002 ULKa a ENG■022 ▼a12259438
■245 ▼aEffect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth▼d공저 Hyoun Woo Kim,Kwang-Sik Kim
■260 ▼a서울▼b대한금속.재료학회▼c2002.
■300 ▼app. 463-468
■653 ▼aEFFECT▼aRINSING▼aDRYING▼aSILICON▼aSURFACE▼aCLEANING▼aEPITAXIAL▼aGROWTH
■700 ▼aHyoun Woo Kim,Kwang-Sik Kim
■773 ▼tMetals and Materials▼gVOL.8 NO.5 (2002 OCTOBER)▼d2002, 10
■SIS ▼aS009194▼b60013551▼h8▼s2


