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ICP(Inductively Coupled Plasma)처리에 따른 n-type SiGe/Metal contact의 SBH(Schottky Barrier Height) 연구
ICP(Inductively Coupled Plasma)처리에 따른 n-type SiGe/Metal contact의 SBH(Schottky Barrier Height) 연구
김이곤, 장호원, 전창민, 송영주, 강진영, | 대한금속.재료학회 | 2005 ,
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