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1
CF₄-Based Neutral-Beam Etch Characteristics of Si and SiO₂Using a Low-Angle forward-Reflected Neutral-beam Etching System
CF₄-Based Neutral-Beam Etch Characteristics of Si and SiO₂Using a Low-Angle forward-Reflected Neutral-beam Etching System
D. H. Lee, | 한국물리학회 | 2006 ,
2
Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition
Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition
E. H. Kim, | 한국물리학회 | 2007 ,
3
Study on the Low-Angle Surface Scattering of the Low-Energy Ions
Study on the Low-Angle Surface Scattering of the Low-Energy Ions
K.S.Min, | 한국물리학회 | 2007 ,
4
Temperature Changes Caused by 13-MeV Proton Irradiation at the Interface of a Pyrex Glass and a Silicon Wafer
Temperature Changes Caused by 13-MeV Proton Irradiation at the Interface of a Pyrex Glass and a Silicon Wafer
E. H. KIM, | 한국물리학회 | 2006 ,
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