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1
Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Using a Corrugated Bridge with HRS MEMS Package
Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Using a Corrugated Bridge with HRS MEMS Package
Yo-Tak Song., | 한국전자파학회 | 2006 ,
2
Vertical Integration of MM-wave MMIC's and MEMS Antennas
Vertical Integration of MM-wave MMIC's and MEMS Antennas
Youngwoo Kwon., | 대한전자공학회 | 2006 ,
3
Adaptive Control of a MEMS Gyroscope Using Lyapunov Methods
Adaptive Control of a MEMS Gyroscope Using Lyapunov Methods
R. P. Leland., | Institute of Electrical and Electronics Engineers | 2006 ,
4
Demonstration of alternative favrication techniques for robust MEMS device
Demonstration of alternative favrication techniques for robust MEMS device
Chang, Sung Pil, | 한국전기전자재료학회 | 2007 ,
5
Consumable approaches of polysilicon MEMS CMP
Consumable approaches of polysilicon MEMS CMP
Park, Sungmin, | 한국전기전자재료학회 | 2007 ,
6
An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
Jonghwa Won, Sung-Hoom Choa, Zhao Yulong, | 대한기계학회 | 2006 ,
7
Design, Fabrication, and Testing of a MEMS Microturbine
Design, Fabrication, and Testing of a MEMS Microturbine
Byung Sun Jeon, Kun Joong Park, Seung Jin Song, Y, | 대한기계학회 | 2005 ,
8
Fatigue Test of MEMS Device : a Monolithic Inkjet Print
Fatigue Test of MEMS Device : a Monolithic Inkjet Print
Jun-Hyub Park, Yong Soo Oh, | 대한기계학회 | 2004 ,
9
Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Deok-Ho Kim, Byungkyu Kim, Jong-Oh Park, | 대한기계학회 | 2004 ,
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