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An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
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MARC
008060428s2006 ULKa a ENG■022 ▼a1738494X
■245 ▼aAn Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology▼dJonghwa Won, Sung-Hoom Choa, Zhao Yulong
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 505-512
■653 ▼aINTEGRATED▼aSENSOR▼aPRESSURE▼aTEMPERATURE▼aRELATIVE▼aHUMIDITY▼aBASED▼aMEMS▼aTECHNOLOGY
■700 ▼aJonghwa Won, Sung-Hoom Choa, Zhao Yulong
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 4)▼d2006, 04
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS021046▼b60064619▼h8▼s2


