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Direct Bonding of Silicon Pairs with Heterogeneous Insulator Using Different Annealing Methods
Direct Bonding of Silicon Pairs with Heterogeneous Insulator Using Different Annealing Methods
Ohsung Song, Kiyung Lee, C. S. Yoon, and C. K. Kim, | 대한금속.재료학회 | 2004 ,
2
High Quality Partially Relaxed SiGe Film Grown on Silicon-on-Insulator Substrate by Ultra-High Vacuum Chemical Vapor Deposition
High Quality Partially Relaxed SiGe Film Grown on Silicon-on-Insulator Substrate by Ultra-High Vacuum Chemical Vapor Deposition
Changchun Chen, Wentao Huang, Zhihiog Liu, | 대한금속.재료학회 | 2004 ,
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