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281
Optimization of Removal Rates with Guaranteed Dispersion Stability in Copper CMP Slurry
Optimization of Removal Rates with Guaranteed Dispersion Stability in Copper CMP Slurry
Tae Gun Kim, | 한국전기전자재료학회 | 2005 ,
282
The Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma
The Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma
Seong Mo Koo, | 한국전기전자재료학회 | 2005 ,
283
Circuit Modeling of 3-D Parallel-plate Capacitors Fabricated by LTCC Process
Circuit Modeling of 3-D Parallel-plate Capacitors Fabricated by LTCC Process
Dong Wook Shin, | 한국전기전자재료학회 | 2005 ,
284
Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method
Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method
Chang Joon Park, | 한국전기전자재료학회 | 2005 ,
285
A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
Sang Yong Kim, | 한국전기전자재료학회 | 2004 ,
286
Polarizers and Splitters on the Base of Multi-layer Systems
Polarizers and Splitters on the Base of Multi-layer Systems
L. I. Berezhinsky, | 한국전기전자재료학회 | 2004 ,
287
A Polycrystalline CdZnTe Film and Its X-ray Response Characteristics for Digital Radiography
A Polycrystalline CdZnTe Film and Its X-ray Response Characteristics for Digital Radiography
Jae Hyung Kim, | 한국전기전자재료학회 | 2004 ,
288
Etching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma
Etching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma
Dong Pyo Kim, | 한국전기전자재료학회 | 2004 ,
289
Etching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma
Etching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma
Dong Pyo Kim, | 한국전기전자재료학회 | 2004 ,
290
Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Sang Yong Kim, | 한국전기전자재료학회 | 2004 ,
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