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Etching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma
Etching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Dong Pyo Kim
- 서명/저자
- Etching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma / Dong Pyo Kim , Chang Il Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2004.
- 형태사항
- pp. 1-4
- 주기사항
- Includes Bibliography
- 기타저자
- Chang Il Kim
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232697
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aDong Pyo Kim
■24510▼aEtching Characteristics of Au Thin Films using Inductively Coupled CF4/ Cl2/Ar Plasma▼dDong Pyo Kim ▼e Chang Il Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 1-4
■500 ▼aIncludes Bibliography
■7001 ▼aChang Il Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.3 (2003 June)▼d2004, 06
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014502▼b60055341▼h8▼s2▼fP
