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Low-Dielectric-Constant SiOC(-H) Films Prepared from DMDMS and O₂ Precursors by Using Plasma Enhanced Chemical Vapor Deposition
Low-Dielectric-Constant SiOC(-H) Films Prepared from DMDMS and O₂ Precursors by Using Plasma Enhanced Chemical Vapor Deposition
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Seung Hyung Kim
- Title/Author
- Low-Dielectric-Constant SiOC(-H) Films Prepared from DMDMS and O₂ Precursors by Using Plasma Enhanced Chemical Vapor Deposition / Seung Hyung Kim ; R. Navamathavan ; An Soo Jung ; Yong Jun Jang ; kwang-Man Lee ; Chi Kyu Choi
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. 1814-1818
- Added Entry-Personal Name
- R. Navamathavan
- Added Entry-Personal Name
- An Soo Jung
- Added Entry-Personal Name
- Yong Jun Jang
- Added Entry-Personal Name
- kwang-Man Lee
- Added Entry-Personal Name
- Chi Kyu Choi
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146096
MARC
008101028s2007 ulka a eng■022 ▼a03744884
■1001 ▼aSeung Hyung Kim
■24510▼aLow-Dielectric-Constant SiOC(-H) Films Prepared from DMDMS and O₂ Precursors by Using Plasma Enhanced Chemical Vapor Deposition▼dSeung Hyung Kim▼eR. Navamathavan▼eAn Soo Jung▼eYong Jun Jang▼ekwang-Man Lee▼eChi Kyu Choi
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1814-1818
■7001 ▼aR. Navamathavan
■7001 ▼aAn Soo Jung
■7001 ▼aYong Jun Jang
■7001 ▼akwang-Man Lee
■7001 ▼aChi Kyu Choi
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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