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1 Results:UU:VOLUME5NUMBER12005 PP:대한전자공학회 AA:HYO-JIN NAM 0.109 sec.
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Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications
Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications
Hyo-Jin Nam, | 대한전자공학회 | 2005 ,
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