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Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Jae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun, | 한국화학공학회 | 2001 ,
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