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Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA
Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA
Hyeon Chang Choi, Jun-Hyub Park, | 대한기계학회 | 2005 ,
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