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Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems
Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems
Hyonse Kim, Chihyun In. Gilho Yoon, Jongwon Kim, | 대한기계학회 | 2005 ,
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