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Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Deok-Ho Kim, Byungkyu Kim, Jong-Oh Park, | 대한기계학회 | 2004 ,
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