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MEMS98 : Micro electro mechanical systems : (An)Investigation of micro structures, sensors, actuators, machines and systems
MEMS98 : Micro electro mechanical systems : (An)Investigation of micro structures, sensors, actuators, machines and systems
IEEE, 550-I22m | Institute of Electrical and Electr | 1998 550-I22m,
2
(1997)International conference on solid-state sensors and actuators : digest of technical papers Vol. 1. sessions 1A1-2D3, papers No. 1A1.01-2D3.14pl.
(1997)International conference on solid-state sensors and actuators : digest of technical papers Vol. 1. sessions 1A1-2D3, papers No. 1A1.01-2D3.14pl.
IEEE, 550-I22i-R | IEEE | 1997 550-I22i-R,
3
(1997)International conference on solid-state sensors and actuators : digest of technical papers Vol. 2. sessions 1A1-2D3, papers No. 1A1.01-2D3.14pl.
(1997)International conference on solid-state sensors and actuators : digest of technical papers Vol. 2. sessions 1A1-2D3, papers No. 1A1.01-2D3.14pl.
IEEE, 550-I22i-R | IEEE | 1997 550-I22i-R,
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