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1
Self-tuning IMC-PID control with interval gain and phase margins assignment
Self-tuning IMC-PID control with interval gain and phase margins assignment
Weng Khuen Ho, | Institute of Electrical and Electronics Engineers | 2001 ,
2
Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process
Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process
Arthur Tay, | Institute of Electrical and Electronics Engineers | 2007 ,
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