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1 Results:AA:SMITH STEVE PP:INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS 0.135 sec.
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Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
M. Gaffney Flynn, | Institute of Electrical and Electronics Engineers | 2001 ,
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