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1
Multivariable feedback relevant system identification of a wafer stepper system
Multivariable feedback relevant system identification of a wafer stepper system
Raymond A. de Callafon, | Institute of Electrical and Electronics Engineers | 2001 ,
2
An Iterative Learning Design for Repeatable Runout Cancellation in Disk Drives
An Iterative Learning Design for Repeatable Runout Cancellation in Disk Drives
M. R. Graham., | Institute of Electrical and Electronics Engineers | 2006 ,
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