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1
Measurements of the Time Evolution of the Electron Density with a Cutoff Probe in a Pulsed RF Plasma
Measurements of the Time Evolution of the Electron Density with a Cutoff Probe in a Pulsed RF Plasma
Jung-Hyung Kim, | 한국물리학회 | 2007 ,
2
Development of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge
Development of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge
Hyung-Yong Kim, | 한국물리학회 | 2006 ,
3
Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Won-Ki Kim, | 한국물리학회 | 2006 ,
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