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1
Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System
Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System
Sang Ho Lee, | 한국전기전자재료학회 | 2007 ,
2
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Lee, Sang-Ho, | 한국전기전자재료학회 | 2007 ,
3
Forced Convection in a Circular Pipe with a Partially Filled Porous Medium
Forced Convection in a Circular Pipe with a Partially Filled Porous Medium
Woo Tae Kim,Ki Hyuck Hong,Myung S Jhon,Jogn G Van, | 대한기계학회 | 2003 ,
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