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1
Micro-Biochemical Reactor with Integrated Pt Heater/Sensor : Fabrication and Analysis
Micro-Biochemical Reactor with Integrated Pt Heater/Sensor : Fabrication and Analysis
Duk-Soo Eun, | 한국물리학회 | 2007 ,
2
Photoresist spray Coating for Resist Film Performance of Deep Silicon Cavities
Photoresist spray Coating for Resist Film Performance of Deep Silicon Cavities
Duk-Soo Eun, | 한국물리학회 | 2007 ,
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