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1
Characterization of Low-temperature SU-8 Negative Photoresist Processing for MEMS Applications (Invited Paper)
Characterization of Low-temperature SU-8 Negative Photoresist Processing for MEMS Applications (Invited Paper)
Gary S. May, | 한국전기전자재료학회 | 2005 ,
2
Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-silicon Nitride Thin Films
Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-silicon Nitride Thin Films
Byungwhan Kim, | 한국물리학회 | 2006 ,
3
Development and Verification of PZT Actuating Micro Tensile Tester for Optically Functional Materials
Development and Verification of PZT Actuating Micro Tensile Tester for Optically Functional Materials
Seung-Soo Kim, Hye-Jin Lee, Hyoung-Wook Lee, Nak-, | The Korean Institute of Electrical Eng. | 2005 ,
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