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1
Self Displacement Sensing (SDS) Nano Stage
Self Displacement Sensing (SDS) Nano Stage
Soo Chang Choi, | 한국정밀공학회 | 2007 ,
2
Nonoscale Fabrication in Aqueous Solution using Tribo-Nanolithography
Nonoscale Fabrication in Aqueous Solution using Tribo-Nanolithography
Jeong Woo Park., | 한국정밀공학회 | 2006 ,
3
Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries
Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries
Chun Hong Park, Yoon Jin Oh, Joo Ho Hwang, Deug W, | 대한기계학회 | 2006 ,
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