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Effect of particle size of ceria coated silica and polishing pressure on chemical mechanical polishing of oxide film
Effect of particle size of ceria coated silica and polishing pressure on chemical mechanical polishing of oxide film
Kim, Hwan-Chul, | 한국전기전자재료학회 | 2007 ,
처음1마지막
1
Annual Review of Nuclear & Particle Science
Annual Reviews Inc. [, ]
2
European Physical Journal C -- Particles & Fields
Springer-Verlag Germany [, ]
3
International Journal of Modern Physics A: Particles & Fields; Gravitation; Cosmology; Nuclear Physics
World Scientific Publishing Company [, ]
4
KOREA-JAPAN Joint Seminar on Particle Image Velocimetry
한국가시화정보학회 [공학, ]
5
KOREA-JAPAN Joint Seminar on Particle Image Velocimetry
한국가시화정보학회 [, ]
6
Particle Physics Insights
Libertas Academica Ltd. [, ]