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Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition
Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition
Sung-min Kang., | 한국물리학회 | 2006 ,
2
MEMS에 의한 On-chip 고종횡비 Air Core Solenoid 인덕터의 제작
MEMS에 의한 On-chip 고종횡비 Air Core Solenoid 인덕터의 제작
Jeong-Bong Lee, | 한국전기전자재료학회 | 2006 ,
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