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1
Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System
Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System
In Ho Moon., | 대한기계학회 | 2006 ,
2
Position Control of Magnetic Levitation Transfer System by Pitch Angle
Position Control of Magnetic Levitation Transfer System by Pitch Angle
Ming Zhao Liu., | 전력전자학회 | 2006 ,
3
Nonlinear Control for Magnetic Levitation of Automotive Engine Vales
Nonlinear Control for Magnetic Levitation of Automotive Engine Vales
K. S. K. S. Peterson., | Institute of Electrical and Electronics Engineers | 2006 ,
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