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1
Bonding Structure and Electrical Properties of SiOC(-H) Films Deposited with a Methyltrimethoxysilane Precursor by Using Inductively Coupled Plasma Chemical Vapor Deposition
Bonding Structure and Electrical Properties of SiOC(-H) Films Deposited with a Methyltrimethoxysilane Precursor by Using Inductively Coupled Plasma Chemical Vapor Deposition
Kannan Meera., | 한국물리학회 | 2006 ,
2
Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
Kim, Kyong Nam, | 한국물리학회 | 2006 ,
3
Experimental Investigations of Pulse-Power-Modulated Inductive Discharges
Experimental Investigations of Pulse-Power-Modulated Inductive Discharges
Seo, Sang-hun, | 한국물리학회 | 2006 ,
4
Signal Transmission Properties of the Inductive Coupler using the High Permeability Magnetic Mterials
Signal Transmission Properties of the Inductive Coupler using the High Permeability Magnetic Mterials
Hyun-Sik Kim, | 한국전기전자재료학회 | 2006 ,
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