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1
Basic Study of the Electric Forces on a Glass Substrate in a Dry Etching System
Basic Study of the Electric Forces on a Glass Substrate in a Dry Etching System
Heehwan Choe., | 한국물리학회 | 2006 ,
2
Fault Detection of Reactive Ion Etching using time series Support Vector Machine
Fault Detection of Reactive Ion Etching using time series Support Vector Machine
박영국, | 한국해양정보통신학회 | 2006 ,
3
저에너지의 Ar중성빔을 이용한 Silicon의 Atomic Layer Etching
저에너지의 Ar중성빔을 이용한 Silicon의 Atomic Layer Etching
오창권, | 한국재료학회 | 2006 ,
4
Fabrication of a Probe Needle using a Tubular Cathode by Electrochemical Etching
Fabrication of a Probe Needle using a Tubular Cathode by Electrochemical Etching
Jae Wong Choi, Gil Ho Hwang, Sung Goon Kang, | Korean Institute of Metals and Materials | 2006 ,
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