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3 Results:SS:DEPOSITION PP:한국물리학회 AA:C. J. CHUNG. 0.125 sec.
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1
Electrical and Optical Properties of Nitrogen-Incorporated Silicon-Oxide Films by Using Plasma-Enhanced Chemical-Vapor Deposition with Tetramethoxysilane /N₂O/NH₃ Gas
Electrical and Optical Properties of Nitrogen-Incorporated Silicon-Oxide Films by Using Plasma-Enhanced Chemical-Vapor Deposition with Tetramethoxysilane /N₂O/NH₃ Gas
C. J. Chung., | 한국물리학회 | 2006 ,
2
Low-Temperature Deposition of Silicon-Nitride Layers by Using PECVD for High Efficiency Si Solar Cells
Low-Temperature Deposition of Silicon-Nitride Layers by Using PECVD for High Efficiency Si Solar Cells
B. Karunagaran., | 한국물리학회 | 2006 ,
3
Time Resolved Photoluminescence Study on Silicon Nitride/Silicon-Rich-Oxide Superlattices Grown by Using Ion-Beam Sputtering Deposition
Time Resolved Photoluminescence Study on Silicon Nitride/Silicon-Rich-Oxide Superlattices Grown by Using Ion-Beam Sputtering Deposition
Cha, Kyu Man, | 한국물리학회 | 2006 ,
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